diff --git a/atomicfile/atomicfile.go b/atomicfile/atomicfile.go
index f2af37182..ec3025340 100644
--- a/atomicfile/atomicfile.go
+++ b/atomicfile/atomicfile.go
@@ -9,20 +9,36 @@
 package atomicfile // import "tailscale.com/atomicfile"
 
 import (
-	"fmt"
 	"io/ioutil"
 	"os"
+	"path/filepath"
 )
 
 // WriteFile writes data to filename+some suffix, then renames it
 // into filename.
-func WriteFile(filename string, data []byte, perm os.FileMode) error {
-	tmpname := filename + ".new.tmp"
-	if err := ioutil.WriteFile(tmpname, data, perm); err != nil {
-		return fmt.Errorf("%#v: %v", tmpname, err)
+func WriteFile(filename string, data []byte, perm os.FileMode) (err error) {
+	f, err := ioutil.TempFile(filepath.Dir(filename), filepath.Base(filename)+".tmp")
+	if err != nil {
+		return err
 	}
-	if err := os.Rename(tmpname, filename); err != nil {
-		return fmt.Errorf("%#v->%#v: %v", tmpname, filename, err)
+	tmpName := f.Name()
+	defer func() {
+		if err != nil {
+			f.Close()
+			os.Remove(tmpName)
+		}
+	}()
+	if _, err := f.Write(data); err != nil {
+		return err
 	}
-	return nil
+	if err := f.Chmod(perm); err != nil {
+		return err
+	}
+	if err := f.Sync(); err != nil {
+		return err
+	}
+	if err := f.Close(); err != nil {
+		return err
+	}
+	return os.Rename(tmpName, filename)
 }